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CTSA - Chapter 5: Conservation

This chapter discusses energy and natural resource issues associated with using the various substitute blanket washes for lithography. The first part of this chapter focuses on the blanket washing process. Standard shop practices such as the amount of blanket wash consumed, the dilution of the blanket wash, the number of shop wipes used, and the method of wipe management are examined in terms of how they affect energy and natural resource consumption. The chapter then moves on to encompass the entire life cycle of the blanket wash formulations. Chemical composition, product formulation and packaging, and waste disposal are all considered part of the blanket wash life cycle, and their impacts on energy and natural resources are discussed. The energy and natural resource trade-offs that exist when considering standard shop practices and life cycle issues are summarized.

5.1 Energy and Resource Conservation During the Blanket Washing Process 5.2 Energy and Resource Conservation Based on Chemical Composition, Formulations and Packaging 5.3 Comparison of Life-Cycle Trade-Off Issues

Chapter 5 in its entirety. [35 K pdf file]

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